vacuum chamber

F1250 x 1000 mm²

effective plating space

F980 x 650 mm²

vacuum ratio limit

6.7 x 10^-4 Pa

Pump air time(from standard air pressure to 4.0*10^-3Pa at room temperature)

< 15 min

Plating time (decorative plating, tool plating)

~ 50 min

(380-400V, 50-60 Hz)

Total power(380-400V, 50-60 Hz)

80 kVA

Cooling water Cycle

3.5 Ton / hr

2.0 kg/cm², 20±5 °C

Cover space

6 x 6 x 3.5 m³

application

Decoration coating & tool coating

Body

1 SET

1)- Vacuum chamber with water cooler

1 set

2)- Rigidity-strengthened arch front-door with two observation holes

1 set

3)- Workpiece rotation holder

.

12 pieces of pothooks combining self-rotation movement (diameter 200mm) with co-rotation

1 set

Vacuum chamber inner ceiling board

2 sets

Arc cathode source flanges installed on the side wall of the body

6 pcs

6)-Outer magnetron control source flanges installed on the side wall of the body

2 pcs

7)-Vacuum chamber electrical heating tube flange installed on the soleplate of the body

1 set

8)-Pedestal of the vacuum chamber

1 set

2-  Vacuum-obtaining system

1 SET

1)LlanZhou K-400T oil diffusing pump with automatic temperature controller

1 set

2)- Kinney sliding vane rotary vacuum pump 2X-70

1 set

3)- Kinney sliding vane rotary vacuum pump 2X-300

1 set

4)- Roots vacuum pump zjp-300

1 set

5)- GDQ-J400 higher vacuum valve

1 set

6)GDQ-J200

1 set

7)- vacuum valves and pipes

1 set

8)- Pneumatic transmission system

1 set

3- Compound vacuum gauges (one ionization vacuum gauge, two thermocouple vacuum gauges)

1 SET

4- Quadruplex  gas quality & flow control system

1 SET

5- hexad reaction gas distribution system

1 SET

6- (LMI717/69B and LMO717/69B) rectangle Non-equilibrium close magnetic field magnetron sputtering control sources group.

2 PAIRS

magnetron sputtering power sourcess

2 SETS

8-  7# arc ion evaporator source (RCAE1047) with automatic Striking Arc system and  arc discharge.

6 SETS

9- vacuum arc power: inverter power supply 250A

6 SETS

pulsed bias 30KW

1 SET

11- Frequency conversion speed regulator control the motor of workpiece rotation holder.

1 SET

Workpiece electrical heating system

12-  high-capacity central electrical heating tube

1 SET

13- PLC control system and integrated control panel

1 SET

14- Power Output control cabinet

1 SET